Method of manufacturing wiring substrate

ABSTRACT

Two stacked bodies, each having a metal layer provided on a first metallic foil with carrier via a first insulating layer, are prepared. The first metallic foil with carrier has a metallic foil provided on a carrier plate via a peeling layer. A joined body is formed by jointing the stacked bodies such that the carrier plates are joined via a joining layer. First conductor patterns are formed by patterning the metal layers on both sides of the joined body. Second metallic foils with carrier are provided to the first conductor patterns of the joined body such that the first conductor patterns are opposed to the metallic foils via second insulating layers. Two substrates are formed by peeling the carrier plates with carrier from the peeling layers. Second conductor patterns which are connected electrically to the first conductor patterns are formed from the metallic foils of the substrate.

This application claims priority to Japanese Patent Application No.2008-267094, filed Oct. 16, 2008, in the Japanese Patent Office. TheJapanese Patent Application No. 2008-267094 is incorporated by referencein its entirety.

TECHNICAL FIELD

The present disclosure relates to a method of manufacturing a wiringsubstrate. More specifically, the present disclosure relates to a methodof manufacturing a multilayer wiring substrate in which a plurality ofconductive patterns are connected electrically via vias, which passthrough an insulating layer, and are stacked.

RELATED ART

As the method of manufacturing the multilayer wiring substrate, forexample, in following Patent Literature 1, the method of manufacturingthe wiring substrate shown in FIGS. 13A to 13F has been proposed.

In the method of manufacturing the wiring substrate shown in FIGS. 13Ato 13F, as shown in FIG. 13A, first a peelable metallic foil 102 isstacked on one surface side of a resin plate 100 that is formed of asemi-cured resin as a strong bearing body. In this peelable metallicfoil 102, as shown in FIG. 14, a metal plate 102 b that is thicker thana metallic foil 102 a is joined onto metallic foil 102 a via a peelinglayer 102 c. In stacking the peelable metallic foil 102 on one surfaceside of the resin plate 100, the peelable metallic foil 102 and theresin plate 100 can be adhered to each other by applying a heating and apressure bonding in a state that the metallic foil 102 a is joined tothe resin plate 100.

As shown in FIG. 13B, the metal plate 102 b side of the peelablemetallic foil 102 stacked on one surface side of the resin plate 100 iscovered partially with a dry film 104. Then, bump recesses 106, 106, . .. are formed by applying the etching to the exposed surface of the metalplate 102 b, and then the dry film 104 is removed [FIG. 13C].

As shown in FIG. 13D, a bump 108 is formed in the bump recesses 106,106, . . . by the plating metal respectively, and conductor patterns 110connected to the bumps 108 respectively are formed. In forming the bumps108, a metal film 112 made of gold, or the like, which is not etched byan etchant that is used to etch the metal plate 102 b as describedlater, is formed.

Also, as shown in FIG. 13D, not only conductor patterns 118, 118, . . .but also vias 116, 116, . . . passing through insulating layers 114,114, . . . respectively are formed on the bumps 108 and the conductorpatterns 110 by the additive process or the semi-additive process.

In this manner, conductor patterns are stacked in a predetermined numberon the metal plate 102 b of the peelable metallic foil 102. Thus, sincea strength of an obtained wiring substrate 120 is improved, the metalplate 102 b of the peelable metallic foil 102 is peeled from themetallic foil 102 a, as shown in FIG. 13F.

Then, the metal plate 102 b is removed by the etching, and so that thewiring substrate 120 can be obtained.

[Patent Literature 1] JP-A-2007-165513

According to the method of manufacturing the wiring substrate shown inFIGS. 13A to 13F, a strength of the wiring substrate can be maintainedby the resin plate 100 as the strong bearing body. Therefore, themultilayer wiring substrate can be manufactured while facilitating theconveyance of the stacked body, etc. in the steps of manufacturing thewiring substrate.

However, in the method of manufacturing the wiring substrate shown inFIGS. 13A to 13F, the metal plate 102 b adhered to the wiring substrate120 that peeled from the resin plate 100 is removed by the etching. Inorder to shorten an etching time of the metal plate 102 b, it isnecessary to make the peelable metallic foil 102 thin. However, thepeelable metallic foil 102 of predetermined thickness is needed to formthe bump recesses 106, 106, . . . in the peelable metallic foil 102. Asa result, it is difficult to shorten a time required to etch thepeelable metallic foil 102.

SUMMARY

Exemplary embodiments of the present invention provide a method ofmanufacturing a wiring substrate that is not needed to remove a metallicfoil by an etching.

The inventors of the present invention arrived at the present inventionas a result of the study made based on a consideration such that it isadvantageous to solve the above problems that conductive patterns shouldbe formed by using a metallic foil with carrier, in which a metallicfoil is stacked on one surface side of a carrier plate as a supportingbody via a release layer.

A method of manufacturing a wiring substrate according to a first aspectof the present invention, comprises:

preparing two stacked bodies, each having a first metallic foil withcarrier, a first insulating layer and a metal layer, the first metallicfoil with carrier having a carrier plate, a peeling layer and a metallicfoil provided on one surface side of the carrier plate via the peelinglayer, the metal layer being thicker than the metallic foil of the firstmetallic foil with carrier and being provided on a metallic foil side ofthe first metallic foil with carrier via the first insulating layer;

forming a joined body by jointing the two stacked bodies such that thecarrier plates are joined via a joining layer;

forming first conductor patterns by patterning the metal layerspositioned on both sides of the joined body respectively;

providing second metallic foils with carrier, each of which has acarrier plate, a peeling layer and a metallic foil provided on onesurface side of the carrier plate via the peeling layer, to the firstconductor patterns formed in the both sides of the joined bodyrespectively via second insulating layers such that the first conductorpatterns are opposed to the metallic foils of the second metallic foilsvia the second insulating layers;

forming two substrates, each of which has the metallic foils of thefirst and second metallic foils with carrier on both surface sides ofthe first conductor patterns via the first and second insulating films,by peeling the carrier plates of the first and second metallic foilswith carrier from the peeling layers of the first and second metallicfoils with carrier; and

forming second conductor patterns which are connected electrically tothe first conductor patterns via vias that pass through the first andsecond insulating layers respectively, from the metallic foils formed onboth surface sides of the substrate.

A method of manufacturing a wiring substrate according to a secondaspect of the present invention, comprising:

preparing two stacked bodies, each of which has two first metallic foilswith carrier and a first insulating layer, each of the first metallicfoils with carrier having a carrier plate, a peeling layer and ametallic foil provided on one surface side of the carrier plate via thepeeling layer, the two first metallic foils with carrier being stackedwith each other such that the respective metallic foils of the firstmetallic foils with carrier are opposed to each other via the firstinsulating layer;

forming a joined body by joining two stacked bodies such that thecarrier plates on one surface side of the stacked bodies are joined viaa joining layer;

forming first conductor patterns which are connected electrically to themetallic foils of the first metallic foils with carrier via vias thatpass through the first insulating layers in the joined bodyrespectively, from the respective metallic foils that are exposed bypeeling the carrier plates provided on both sides of the joined bodyrespectively;

providing second metallic foils with carrier, each of which has acarrier plate, a peeling layer and a metallic foil provided on onesurface side of the carrier plate via the peeling layer, to the firstconductor patterns via second insulating layers such that the firstconductor patterns are opposed to the metallic foils of the secondmetallic foils with carrier respectively;

forming two substrates, each of which has the metallic foils of thefirst and second metallic foils with carrier on both surface sides ofthe first conductor patterns via the first and second insulating films,by peeling the carrier plates of the first and second metallic foilswith carrier from the peeling layers of the first and second metallicfoils with carrier; and

forming second conductor patterns, which are connected electrically tothe first conductor patterns via vias that pass through the first andsecond insulating layers respectively, from the metallic foils formed onboth surface sides of the substrate.

In a method of manufacturing a wiring substrate according to the firstor second aspect of the present invention, the method may furthercomprises:

stacking sequentially a plurality of conductor patterns, which areconnected electrically via vias that pass through third insulatinglayers, on the both surface sides of the substrate that contains thefirst conductor patterns therein to form the wiring substrate, in whichthe conductor patterns are formed as an odd-numbered layer.

A method of manufacturing a wiring substrate according to a fourthaspect of the present invention, comprises:

preparing two stacked bodies, each of which has two first metallic foilswith carrier and a first insulating layer, each of the first metallicfoils with carrier having a carrier plate, a peeling layer and ametallic foil provided on one surface side of the carrier plate via thepeeling layer, the two first metallic foils with carrier being stackedwith each other such that the respective metallic foils of the firstmetallic foils with carrier are opposed to each other via the firstinsulating layer;

forming a joined body by joining two stacked bodies such that thecarrier plates on one surface side of the stacked bodies are joined viaa joining layer;

forming first conductor patterns which are connected electrically to themetallic foils of the first metallic foils with carrier via vias thatpass through the first insulating layers in the joined bodyrespectively, from the respective metallic foils that are exposed bypeeling the carrier plates provided on both sides of the joined bodyrespectively;

providing second metallic foils with carrier, each of which has acarrier plate, a peeling layer and a metallic foil provided on onesurface side of the carrier plate via the peeling layer, to the firstconductor patterns via second insulating layer such that the firstconductor patterns are opposed to the metallic foils of the secondmetallic foils with carrier respectively;

forming second conductor patterns which are connected electrically tothe first conductor patterns via vias that pass through the secondinsulating layers, from the metallic foils that are exposed by peelingthe carrier plates of the second metallic foils with carrier;

providing third metallic foils with carrier, each of which has a carrierplate, a peeling layer and a metallic foil provided on one surface sideof the carrier plate via the peeling layer, to the second conductorpatterns via third insulating layers such that the second conductorpatterns are opposed to the metallic foils of the third metallic foilswith carrier; and

forming two substrates, which has the metallic foils of the first andthird metallic foils with carrier to put the first conductor patternsand the second conductor patterns therebetween, by peeling the carrierplates of the first and third metallic foils with carrier.

In a method of manufacturing a wiring substrate according to the fourthaspect of the present invention, the method may further comprises:

stacking sequentially a plurality of conductor patterns, which areconnected electrically via vias that pass through fourth insulatinglayers, on both surface sides of the substrate that contains therein thefirst conductor patterns and the second conductor patterns that areconnected electrically via the vias that pass through the secondinsulating layers to form the wiring substrate, in which conductorpatterns are formed as an even-numbered layer.

In a method of manufacturing a wiring substrate according to the first,second or fourth aspect of the present invention, the metallic foil ofeach of the first and second metallic foils with carrier may be a copperfoil, and the carrier plate may be a copper plate.

In a method of manufacturing a wiring substrate according to the first,second or fourth aspect of the present invention, the method may furthercomprises:

forming the vias by forming via holes in the first or second insulatinglayer by a laser and then filling the via holes with a plating metal.

According to the method of manufacturing the wiring substrate accordingto the present invention, the step of removing the metallic plate by theetching, which is needed in the method of manufacturing the wiringsubstrate in the prior art shown in FIGS. 13A to 13F, can be omitted.Therefore, the steps of manufacturing the wiring substrate can beshortened.

Also, in the preset invention, the carrier plate of the metallic foilwith carrier is employed as the strong bearing body. As a result, astrength of the stacked body can be maintained during the manufacturingstep, and the trouble caused due to the deformation of the stacked bodyby the roller, or the like during the manufacturing step can beprevented.

Other features and advantages may be apparent from the followingdetailed description, the accompanying drawings and the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1D show process drawings explaining an exemplary embodimentof a method of manufacturing a wiring substrate according to the presentinvention.

FIGS. 2A to 2B show process drawings explaining steps following theprocess drawing shown in FIG. 1D.

FIGS. 3A to 3E show process drawings explaining steps following theprocess drawing shown in FIG. 2B.

FIG. 4 shows a partial cross sectional view explaining a metallic foilwith carrier used in the method of manufacturing a wiring substrateshown in FIGS. 1A-3E.

FIGS. 5A to 5C show process drawings explaining another exemplaryembodiment of a method of manufacturing a wiring substrate according tothe present invention.

FIGS. 6A to 6C show process drawings explaining steps following theprocess drawing shown in FIG. 5C.

FIGS. 7A to 7B show process drawings explaining steps following theprocess drawing shown in FIG. 6C.

FIG. 8 shows a process drawing explaining steps following the processdrawing shown in FIG. 7B.

FIGS. 9A to 9D show process drawings explaining steps following theprocess drawing shown in FIG. 8.

FIGS. 10A to 10B show process drawings explaining further anotherexemplary embodiment of a method of manufacturing a wiring substrateaccording to the present invention.

FIGS. 11A to 11B show process drawings explaining steps following theprocess drawing shown in FIG. 10B.

FIG. 12 shows a process drawing explaining steps following the processdrawing shown in FIG. 11B.

FIGS. 13A to 13F show process drawings explaining a method ofmanufacturing a wiring substrate in a related art.

FIG. 14 shows a partial cross sectional view explaining a peelablemetallic foil used in the related-art method of manufacturing a wiringsubstrate.

DETAILED DESCRIPTION

An exemplary embodiment of a method of manufacturing the wiringsubstrate according to the present invention is shown in FIG. 1A to FIG.3E hereunder. First, as shown in FIG. 1A, a stacked body 11 is formed bystacking a copper foil 14, which is formed of a metal layer thicker thana metallic foil 10 b, on the metallic foil 10 b side of a metallic foilwith carrier 10 via an insulating layer 12 made of a resin. As thiscopper foil 14, a copper foil of 18 μm thick is employed.

In stacking the copper foil 14 on the metallic foil with carrier 10, theheating and the press bonding can be applied while using a sheet, whichis formed of a thermosetting resin in a semi-cured state, as theinsulating layer 12.

Also, as shown in FIG. 4, in the metallic foil with carrier 10, themetallic foil 10 b is provided on one surface side of a carrier plate 10a as the strong bearing body via a peeling layer 10 c. A copper plate of15 to 70 μm thick can be employed as the carrier plate 10 a, and acopper foil of 0.5 to 12 μm thick can be employed as the metallic foil10 b.

Two stacked bodies 11, 11 shown in FIG. 1A are stacked by joining thecarrier plates 10 a, 10 a via a joining layer 15. Thus, a joined body 17shown in FIG. 1B is formed. The joining layer 15 is a sheet that isformed of a thermosetting resin in a semi-cured state, and can be heatedand pressure-bonded. Both surfaces of the joined body 17 are formed ofthe copper foil 14 respectively.

As shown in FIG. 1C, exposed surfaces of the copper foils 14, 14 arecovered partially with dry films 16, 16.

The dry films 16, 16 are peeled by etching the portions where thesurface of the copper foil 14 is exposed partially respectively. Thus,as shown in FIG. 1D, first conductor patterns 18, 18, . . . can beformed on both surfaces of the joined body 17. The first conductorpatterns 18, 18, . . . can be employed preferably for a power feed orground since these patterns are formed in the center portion of thewiring substrate, as described later.

Also, as shown in FIG. 2A, the metallic foil with carrier 10 is providedon both surface sides of the joined body 17, on which the firstconductor patterns 18, 18, . . . are formed as shown in FIG. 1D, via theinsulating layer 12 respectively. The metallic foil with carrier 10 isprovided such that the metallic foil 10 b is opposed to the firstconductor patterns 18, 18, . . . In this case, a sheet formed of athermosetting resin in a semi-cured state is employed as the insulatinglayer 12, and the heating and the pressure-bonding are applied.

In the joined body 17 obtained in this manner and shown in FIG. 2A, fourmetallic foils with carrier 10 are provided.

Then, as shown in FIG. 2B, the carrier plates 10 a of the metallic foilswith carrier 10, 10, 10 in the joined body 17 are peeled from themetallic foil 10 b respectively. Thus, two substrates 20, 20 in whichthe first conductor patterns 18, 18, . . . are formed in the centerportion can be obtained. In the substrate 20, the insulating layers 12,12 that are covered with the metallic foil 10 b respectively are formedon both surface sides of the first conductor patterns 18, 18, . . .formed in the center portion. Therefore, the substrate 20 can be easilycarried.

In procedures shown in FIGS. 3A to 3E, conductor patterns that areconnected by the first conductor patterns 18, 18, . . . formed in thecenter portion and vias are formed on the substrates 20, 20respectively, and thus the wiring substrate can be obtained. In FIGS. 3Ato 3E, steps of manufacturing the wiring substrate employing one of thesubstrates 20, 20 is illustrated.

First, as shown in FIG. 3A, in the substrate 20, via holes 22, 22, frombottom surfaces of which the first conductor pattern 18 is exposedrespectively, are formed in predetermined positions of the metallic foil10 b by the laser. Since this via hole 22 is formed by the laser, thevia hole 22 is formed like a taper shape whose inner diameter is reducedgradually toward the bottom surface from the opening portion. In thiscase, the residues produced in forming the via holes 22, 22, . . . bythe laser are removed by applying the desmear process to the substrate20.

As shown in FIG. 3B, a thin metal film 23 is formed on the whole surfaceof the substrate 20 containing inner wall surfaces of the via holes 22,22, . . . on both sides by the electroless plating or the vapordeposition.

Also, shown in FIG. 3C, the dry films 16, 16 are patterned, and then theelectroplating is applied by using the metallic foil 10 b and the thinmetal film 23 as a power feeding layer. Thus, vias 24, 24 that areformed by filling a plating metal in the via holes 22, 22, . . . , andsecond conductor patterns 28, 28 . . . that are connected electricallyto the first conductor pattern 18 via the via 24 respectively can beformed on both surface sides of the substrate 20.

Then, as shown in FIG. 3D, the metallic foil 10 b and the thin metalfilm 23 being exposed by peeling the dry films 16, 16 are etched. Thus,as shown in FIG. 3D, the second conductor patterns 28, 28 . . .connected electrically to the first conductor pattern 18 via the via 24respectively can be formed on both surface sides of the substrate 20.

Then, as shown in FIG. 3E, the second conductor patterns 28, 28 . . .are covered with a solder resist 32 except the areas where pads 34 areformed. Accordingly, a wiring substrate 30 can be obtained.

In this manner, in the method of manufacturing the wiring substrateshown in FIG. 1A to FIG. 3E, the carrier plate 10 a of the metallic foilwith carrier 10 acts as the strong bearing body in the joined body 17.Therefore, the conveyance of the joined body 17 can be handled withoutany trouble.

Also, like the method of manufacturing the wiring substrate shown inFIGS. 13A to 13F, the step of removing the metal plate 102 b by theetching can be omitted, and the shortening of the steps of manufacturingthe wiring substrate 30 can be attained.

In the method of manufacturing the wiring substrate shown in FIG. 1A toFIG. 3E, as shown in FIG. 3A, in such a situation that the via holes 22,22, . . . must be formed on the first conductor patterns 18 from bothsurface sides by the laser, when the via holes 22 are formed from theother surface side of the first conductor patterns 18 by the laser in acondition that the first conductor patterns 18 are exposed from thebottom surfaces of the via holes 22 formed from one surface side of thefirst conductor patterns 18 by the laser, it is feared that the firstconductor patterns 18 exposed from bottom surfaces of the via holes 22that have already been formed from the one surface side of the firstconductor patterns 18 are destroyed.

In this respect, according to a method of manufacturing the wiringsubstrate shown in FIG. 5A to FIG. 9D, it is possible to overcome such afear that the first conductor patterns 18 are destroyed when the viaholes 22 are formed in the substrate 20 by the laser.

First, as shown in FIG. 5A, two stacked bodies 11 are formed by joiningtwo metallic foils with carrier 10, 10 such that the metallic foils 10b, 10 b are opposed to each other via the insulating layer 12 formed ofa resin. This joining can be executed by applying the heating and thepress bonding while putting a sheet formed of a thermosetting resin in asemi-cured state as the insulating layer 12 between the metallic foilswith carrier 10, 10.

Also, the joined body 17 shown in FIG. 5B is formed by joining twostacked bodies 11 via the joining layer 15. This joining by using thejoining layer 15 can be executed by applying the heating and the pressbonding while putting a sheet formed of a thermosetting resin in asemi-cured state as the joining layer 15 between the stacked bodies 11,11.

Then, the carrier plates 10 a of the metallic foils with carrier 10, 10are peeled from both surface sides of the joined body 17 obtained inthis manner. Thus, as shown in FIG. 5C, the joined body 17 from bothsurface sides of which the metallic foils 10 b, 10 b are exposed isobtained.

In the joined body 17 from both surface sides of which the metallicfoils 10 b, 10 b are exposed, as shown in FIG. 6A, the via holes 22, 22,. . . from the bottom surfaces of which the metallic foil 10 b of othermetallic foil with carrier 10 is exposed respectively are formed on bothsurfaces of the joined body 17 at predetermined locations of themetallic foils 10 b, 10 b by the laser. Since this via hole 22 is formedby the laser, the via hole 22 is formed like a taper shape whose innerdiameter is reduced gradually toward the bottom surface from the openingportion. The residues produced in forming the via holes 22, 22, . . . bythe laser are removed by applying the desmear process to the substrate20.

As shown in FIG. 6B, the thin metal film 23 is formed on the wholesurface on one surface side of the insulating layers 12, 12, . . .containing inner wall surfaces of the via holes 22, 22, . . . by theelectroless plating or the vapor deposition.

Also, shown in FIG. 6C, the dry films 16, 16 are patterned, and then thevia-fill electroplating is applied by using the metallic foil 10 b andthe thin metal film 23 as a power feeding layer. Thus, vias 24, 24 thatare formed by filling a plating metal in the via holes 22, 22, . . . ,and the first conductor patterns 18, 18 are formed on both surface sidesof the joined body 17.

The dry films 16, 16 are peeled, and then the metallic foil 10 b and thethin metal film 23 being exposed are etched. Thus, as shown in FIG. 7A,the first conductor patterns 18, 18, . . . and the via holes 22, 22, . .. can be formed on both surface sides of the joined body 17.

The metallic foil with carrier 10 is provided on both surface sides ofthe joined body 17, on both surface sides of which the first conductorpatterns 18, 18, . . . and the via holes 22, 22, . . . are formed, viathe insulating layer 12 respectively such that the metallic foil withcarrier 10 is opposed to the first conductor patterns 18, 18, . . .[FIG. 7B].

In the joined body 17 obtained in this manner and shown in FIG. 7B, fourmetallic foils with carrier 10, 10, 10 are provided.

Then, as shown in FIG. 8, respective carrier plates 10 a of the metallicfoils with carrier 10, 10, 10 in the joined body 17 are peeled from themetallic foil 10 b respectively. Thus, the substrates 20, 20 in whichthe insulating layer 12 being covered with the metallic foil 10 b isformed on both surface sides of the first conductor patterns 18, 18, . .. formed in the center potion respectively can be obtained. The via 24that passes through one side of the insulating layers 12, 12 is formedat the locations of the first conductor patterns 18, 18, . . .respectively.

In this substrate 20, the insulating layers 12, 12 are formed on bothsurface sides of the first conductor patterns 18, 18, . . . formed inthe center portion. Therefore, the conveyance of the substrate 20 can beeasily carried out.

In procedures shown in FIGS. 9A to 9D, the conductor patterns that areconnected by the first conductor patterns 18, 18, . . . formed in thecenter portion and vias are formed on the substrates 20, 20respectively, and thus the wiring substrate can be obtained. In FIGS. 9Ato 9D, the steps of manufacturing the wiring substrate using one ofsubstrates 20 are illustrated.

First, as shown in FIG. 9A, the via holes 22, 22, from bottom surfacesof which the first conductor pattern 18 or the via 24 is exposedrespectively, are formed in predetermined positions of the metallic foil10 b on the first conductor patterns 18, 18 side of the substrate 20 bythe laser. At this time, since the insulating layer 12 or the via 24 isformed on the other surface side of the first conductor patterns 18, thesituation that the first conductor patterns 18 are destroyed by animpact caused by the laser can be prevented even when the laser isirradiated onto one surface side of the first conductor patterns 18exposed from the bottom surfaces of the via holes 22.

Then, as shown in FIG. 9B, the thin metal film 23 is formed on bothsurfaces of the substrate 20, from which the metallic foils 10 b, 10 bare exposed, by the electroless plating or the vapor deposition. Also,the thin metal film 23 is formed on the inner wall surfaces of the viaholes 22, 22 . . .

Then, as shown in FIG. 9C, the dry films 16, 16 are patterned, and thenthe via-fill electroplating is applied by using the metallic foil 10 band the thin metal film 23 as a power feeding layer. Thus, vias 24, 24that are formed by filling the plating metal in the via holes 22, 22, .. . , and the second conductor patterns 28, 28 are formed on bothsurface sides of the substrate 20.

Then, the metallic foil 10 b and the thin metal film 23 exposed bypeeling the dry films 16, 16 are etches. Thus, the second conductorpatterns 28, 28 . . . that are connected electrically to the firstconductor pattern 18 via the via 24 respectively can be formed on bothsurface sides of the substrate 20.

Then, the second conductor patterns 28, 28 . . . are covered with thesolder resist 32 except the areas where pads 34 are formed (See FIG.3E). Accordingly, as shown in FIG. 9D, the wiring substrate 30 can beobtained.

In the method of manufacturing the wiring substrate shown in FIG. 1A toFIG. 9D, the wiring substrate in which three-layered conductor patternsare stacked is manufactured. In this case, when the multilayer wiringsubstrate is manufactured further, the conductor patterns are formedsimultaneously on both surface sides of the substrate 20 by the publiclyknown additive process or the additive process to prevent generation ofwarp, or the like of the substrate 20.

In this manner, in the method of manufacturing the wiring substrateshown in FIG. 1A to FIG. 9D, the wiring substrate in which the conductorpatterns are stacked as odd-numbered layers can be obtained.

Also, the wiring substrate in which the conductor patterns are stackedin the odd number can be obtained by peeling respective carrier plates10 a of the metallic foils with carrier 10, 10 provided on both surfacesides of the joined body 17 shown in FIG. 7B.

In contrast to the method of manufacturing the wiring substrate shown inFIG. 1A to FIG. 9D, according to the manufacturing method shown in FIG.10A to FIG. 12, the wiring substrate in which the conductor patterns arestacked as even-numbered layers can be obtained.

First, the carrier plate 10 a of the metallic foil with carrier 10provided on both surface sides of the joined body 17 shown in FIG. 7B ispeeled respectively. Thus, as shown in FIG. 10A, the metallic foil 10 bis exposed on both surface sides of the joined body 17 respectively.

Then, as shown in FIG. 10B, the via holes 22, 22, . . . , from bottomsurfaces of which the first conductor pattern 18 or the via 24 isexposed respectively, are formed in predetermined positions of themetallic foil 10 b exposed on both sides of the joined body 17 by thelaser.

The thin metal film 23 is formed on the whole surface on both surfacesof the joined body 17, in which the via holes 22, 22, . . . are formed,on the insulating layer 12 side by the electroless plating or the vapordeposition. Also, the thin metal film 23 is formed on the inner wallsurfaces of the via holes 22, 22 . . . .

Then, the dry films 16, 16 provided on the thin metal film 23respectively are patterned, and then the via-fill electroplating isapplied by using the metallic foil 10 b and the thin metal film 23 as apower feeding layer. Thus, vias 24, 24, . . . are formed by filling theplating metal in the via holes 22, 22, . . . , and also second conductorpatterns 36, 36 are formed [FIG. 11A].

Then, the dry films 16, 16 are peeled, and then the metallic foil 10 band the thin metal film 23 being exposed on both surface sides of thejoined body 17 are etched. Thus, the second conductor patterns 28, 28each connected electrically to the first conductor pattern 18 via thevia 24 are formed, and then the insulating layer 12 is formed on bothsurface sides of the joined body 17 respectively.

Also, as shown in FIG. 11B, the metallic foil with carrier 10 is stackedon the insulating layer 12 formed on both surface sides of the joinedbody 17 respectively. This metallic foil with carrier 10 is stacked suchthat the metallic foil 10 b is opposed to the second conductor patterns28, 28.

In the joined body 17 formed in this manner and shown in FIG. 11B, fourmetallic foils with carrier 10, 10, 10, 10 are provided.

Then, as shown in FIG. 12, the metallic foils 10 b of four metallicfoils with carrier 10 of the joined body 17 are peeled respectively.Thus, the substrates 20, 20 in which the metallic foil 10 b is providedon both surface sides respectively and also the first conductor patterns18, 18 and the second conductor patterns 28, 28 are formed can beobtained.

In the substrates 20, 20 shown in FIG. 12, as shown in FIG. 9A, the viaholes 22, 22, . . . , from the bottom surfaces of which the secondconductor pattern 28 is exposed respectively, are formed in the metallicfoil 10 b exposed to the second conductor pattern 28 side by the laserrespectively.

Also, the thin metal film 23 is formed on the whole surface on bothsurfaces containing inner wall surfaces of the via holes 22, 22, . . .of the substrate 20, from which the metallic foil 10 b is exposedrespectively, by the electroless plating or the vapor deposition.

Then, the dry films 16, 16 are patterned, and then the via-fillelectroplating is applied by using the metallic foil 10 b and the thinmetal film 23 as a power feeding layer. Thus, the vias 24, 24 are formedby filling the plating metal in the via holes 22, 22, . . . , and alsothe second conductor patterns 28, 28, . . . each connected electricallyto the first conductor pattern 18 via the via hole 22 respectively areformed on both surface sides of the substrate 20, so that the conductorpatterns are formed as four layers in total.

In this manner, in the method of manufacturing the wiring substrateshown in FIG. 10A to FIG. 12, the wiring substrate in which theconductor patterns are stacked in an even number can be obtained.

In the above explanation, the via holes 22 are formed by the laser. Butthe via holes 22 can be formed by using the metallic foil 10 b providedon the insulating layer 12 formed of a photosensitive resin. In thiscase, predetermined locations of the metallic foil 10 b are removed bythe laser, and then the via holes 22 can be formed byexposing/developing the insulating layer 12 formed of the exposedphotosensitive resin while using the left metallic foil 10 b as a mask.

Otherwise, the recess portions from the bottom surfaces of which themetallic foil 10 b is exposed respectively are formed at predeterminedlocations in the resist that is coated on the metallic foil 10 b, andthen the exposed metallic foil 10 b is removed by the etching to exposethe insulating layer 12 formed of the exposed photosensitive resin.Then, then the via holes 22 can be formed by exposing/developing theexposed insulating layer 12.

Also, the via-fill method using the electroplating is explained when thevias 24 are formed by filing a metal in the via holes 22. But the vias24 may be formed by filling the conductive paste in the via holes 22.

In this case, the conductor patterns may be formed after the vias 24 areformed.

While the invention has been described with respect to a limited numberof embodiments, those skilled in the art, having benefit of thisdisclosure, will appreciate that other embodiments can be devised whichdo not depart from the scope of the invention as disclosed herein.Accordingly, the scope of the invention should be limited only by theattached claims.

1. A method of manufacturing a wiring substrate, comprising: preparingtwo stacked bodies, each having a first metallic foil with carrier, afirst insulating layer and a metal layer, the first metallic foil withcarrier having a carrier plate, a peeling layer and a metallic foilprovided on one surface side of the carrier plate via the peeling layer,the metal layer being thicker than the metallic foil of the firstmetallic foil with carrier and being provided on a metallic foil side ofthe first metallic foil with carrier via the first insulating layer;forming a joined body by jointing said two stacked bodies such that thecarrier plates are joined via a joining layer; forming first conductorpatterns by patterning the metal layers positioned on both sides of thejoined body respectively; providing second metallic foils with carrier,each of which has a carrier plate, a peeling layer and a metallic foilprovided on one surface side of the carrier plate via the peeling layer,to the first conductor patterns formed in the both sides of the joinedbody respectively via second insulating layers such that the firstconductor patterns are opposed to the metallic foils of the secondmetallic foils via the second insulating layers; forming two substrates,each of which has the metallic foils of the first and second metallicfoils with carrier on both surface sides of the first conductor patternsvia the first and second insulating films, by peeling the carrier platesof the first and second metallic foils with carrier from the peelinglayers of the first and second metallic foils with carrier; and formingsecond conductor patterns which are connected electrically to the firstconductor patterns via vias that pass through the first and secondinsulating layers respectively, from the metallic foils formed on bothsurface sides of the substrate.
 2. A method of manufacturing a wiringsubstrate, comprising: preparing two stacked bodies, each of which hastwo first metallic foils with carrier and a first insulating layer, eachof the first metallic foils with carrier having a carrier plate, apeeling layer and a metallic foil provided on one surface side of thecarrier plate via the peeling layer, the two first metallic foils withcarrier being stacked with each other such that the respective metallicfoils of the first metallic foils with carrier are opposed to each othervia the first insulating layer; forming a joined body by joining twostacked bodies such that the carrier plates on one surface side of thestacked bodies are joined via a joining layer; forming first conductorpatterns which are connected electrically to the metallic foils of thefirst metallic foils with carrier via vias that pass through the firstinsulating layers in the joined body respectively, from the respectivemetallic foils that are exposed by peeling the carrier plates providedon both sides of the joined body respectively; providing second metallicfoils with carrier, each of which has a carrier plate, a peeling layerand a metallic foil provided on one surface side of the carrier platevia the peeling layer, to the first conductor patterns via secondinsulating layers such that the first conductor patterns are opposed tothe metallic foils of the second metallic foils with carrierrespectively; forming two substrates, each of which has the metallicfoils of the first and second metallic foils with carrier on bothsurface sides of the first conductor patterns via the first and secondinsulating films, by peeling the carrier plates of the first and secondmetallic foils with carrier from the peeling layers of the first andsecond metallic foils with carrier; and forming second conductorpatterns, which are connected electrically to the first conductorpatterns via vias that pass through the first and second insulatinglayers respectively, from the metallic foils formed on both surfacesides of the substrate.
 3. A method of manufacturing a wiring substrate,according to claim 1, further comprising: stacking sequentially aplurality of conductor patterns, which are connected electrically viavias that pass through third insulating layers, on the both surfacesides of the substrate that contains the first conductor patternstherein to form the wiring substrate, in which the conductor patternsare formed as an odd-numbered layer.
 4. A method of manufacturing awiring substrate, according to claim 2, further comprising: stackingsequentially a plurality of conductor patterns, which are connectedelectrically via vias that pass through third insulating layers, on theboth surface sides of the substrate that contains the first conductorpatterns therein to form the wiring substrate, in which the conductorpatterns are formed as an odd-numbered layer.
 5. A method ofmanufacturing a wiring substrate, comprising: preparing two stackedbodies, each of which has two first metallic foils with carrier and afirst insulating layer, each of the first metallic foils with carrierhaving a carrier plate, a peeling layer and a metallic foil provided onone surface side of the carrier plate via the peeling layer, the twofirst metallic foils with carrier being stacked with each other suchthat the respective metallic foils of the first metallic foils withcarrier are opposed to each other via the first insulating layer;forming a joined body by joining two stacked bodies such that thecarrier plates on one surface side of the stacked bodies are joined viaa joining layer; forming first conductor patterns which are connectedelectrically to the metallic foils of the first metallic foils withcarrier via vias that pass through the first insulating layers in thejoined body respectively, from the respective metallic foils that areexposed by peeling the carrier plates provided on both sides of thejoined body respectively; providing second metallic foils with carrier,each of which has a carrier plate, a peeling layer and a metallic foilprovided on one surface side of the carrier plate via the peeling layer,to the first conductor patterns via second insulating layer such thatthe first conductor patterns are opposed to the metallic foils of thesecond metallic foils with carrier respectively; forming secondconductor patterns which are connected electrically to the firstconductor patterns via vias that pass through the second insulatinglayers, from the metallic foils that are exposed by peeling the carrierplates of the second metallic foils with carrier; providing thirdmetallic foils with carrier, each of which has a carrier plate, apeeling layer and a metallic foil provided on one surface side of thecarrier plate via the peeling layer, to the second conductor patternsvia third insulating layers such that the second conductor patterns areopposed to the metallic foils of the third metallic foils with carrier;and forming two substrates, which has the metallic foils of the firstand third metallic foils with carrier to put the first conductorpatterns and the second conductor patterns therebetween, by peeling thecarrier plates of the first and third metallic foils with carrier.
 6. Amethod of manufacturing a wiring substrate, according to claim 5,further comprising: stacking sequentially a plurality of conductorpatterns, which are connected electrically via vias that pass throughfourth insulating layers, on both surface sides of the substrate thatcontains therein the first conductor patterns and the second conductorpatterns that are connected electrically via the vias that pass throughthe second insulating layers to form the wiring substrate, in whichconductor patterns are formed as an even-numbered layer.
 7. A method ofmanufacturing a wiring substrate, according to claim 1, wherein themetallic foil of each of the first and second metallic foils withcarrier is a copper foil, and the carrier plate is a copper plate.
 8. Amethod of manufacturing a wiring substrate, according to claim 2,wherein the metallic foil of each of the first and second metallic foilswith carrier is a copper foil, and the carrier plate is a copper plate.9. A method of manufacturing a wiring substrate, according to claim 5,wherein the metallic foil of each of the first to third metallic foilswith carrier is a copper foil, and the earner plate is a copper plate.10. A method of manufacturing a wiring substrate, according to claim 1,further comprising: forming the vias by forming via holes in the firstor second insulating layer by a laser and then filling the via holeswith a plating metal.
 11. A method of manufacturing a wiring substrate,according to claim 2, further comprising: forming the vias by formingvia holes in the first or second insulating layer by a laser and thenfilling the via holes with a plating metal.
 12. A method ofmanufacturing a wiring substrate, according to claim 5, furthercomprising: forming the vias by forming via holes in the first or secondinsulating layer by a laser and then filling the via holes with aplating metal.